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This paper provides an in-depth technical analysis of monitoring historical CPU and memory usage for specific processes in Windows systems. Through detailed examination of Performance Monitor (perfmon) core functionalities, it presents comprehensive configuration procedures for counter logs to record process performance data. The study contrasts auxiliary tools like Process Explorer and incorporates cross-platform monitoring insights from Linux environments. Programmatic implementation principles and practical application scenarios are thoroughly discussed, offering system administrators and developers a complete reference for performance diagnostics and optimization strategies.